The breakdown voltage curves and spatial profiles of ionization rates in argon rf discharges

摘要

This paper contains results of simulations of the breakdown voltage curves and spatial profiles of ionization rates in rf discharge in argon. Results were obtained by using Monte Carlo collision code including electrons only. The obtained results clearly show that, in the lower voltage case, the issue is to achieve sufficient ionization to compensate for the losses and therefore any increase in voltage leads to a higher ionization. Most of the electrons are produced in proximity of electrodes. As the voltage is increased, most of electrons are pushed to the electrode by the strong field and therefore ionization occurs adjacent to the electrode and losses are enormous. Any further increase of voltage will push electrons even closer and not allow space for ionization to develop.