The paper describes a novel way of gas sensor fabrication that combines MEMS membrane structures with thick film technology for use of industrially available metal oxide compositions in future low power devices. Two different approaches have been tested. Both approaches use thick film materials to realize the sensitive layers on membranes. The first approach is a slightly modified screen printing technology, that utilized a temporary underfilling of the freestanding membranes. The second approach is the use of the photo lithography with photo resist and micro scale metal oxide powder mixtures. Both techniques have been proven to be practicable and are discussed in terms of structuring resolution and technological expense.
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