PLATFORM FOR AMPEROMETRIC, THIN-FILM ELECTROCHEMICAL GAS SENSORS INCORPORATING MICROFABRICATION AND MICROMACHINING TECHNIQUES

摘要

In this work, we are focused on developing a platform for electrochemical microsensors. An yttria-stabilized zirconia solid electrolyte sensor for oxygen detection and a NASICON electrolyte based carbon dioxide sensor were developed using microfabrication and micromachining techniques. Electron beam evaporation of the zirconia and NASICON electrolytes was an important processing advance in this endeavor. Amperometric limiting current operation was chosen for wide concentration range operation and relatively simple sensor manufacturing. The overall dimensions of this device platform were 1.4mm x 1.5mm. Development of cross-reactive sensor arrays was another focus of this research effort. The inclusion of these sensors in an array of differing sensors, e.g. tin oxide resistors, offered an advantage of high selectivity to analytes of interest.