Effect of NH_3 atmosphere on preparation of AI_2O_3-AtN composite film by laser CVD

摘要

AI_2O_3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)_3) and ammonia (NH_3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from a-AI_2O_3 to ALN gradually with increasing the mole ratio of NH_3 to Ar. AI_2O_3-AIN composite film was obtained at NH_3/Ar ratio ranged from 0.09 to 0.16 (T_(dep) = 862-887 K), and AlN granular grains were embedded in between (X-Al_2O_3 polyhedral grains.