Preparation of á-AI_2O_3/TIN multilayer coating on Ts(C,N)-based cermet by laser CVD

摘要

á-AI_2O_3 and á-AI_2O_3/TiN multilayer films were prepared on Ti(C,N)-based cermet substrate by laser chemical vapor deposition, á-AI_2O_3 and NaCl-type TiN films were prepared at T_(dep) = 1148 K. á-AI_2O_3/TiN multilayer film showed dense structure of cross section, and its surface morphology consisted of aggregated spherical grains. The adhesion of á-AI_2O_3/TiN multilayer film prepared on Ti(C,N)-based cermet was higher as compared with á-AI_2O_3 film directly prepared on the cermet.