Fabrication and Microstructure of Electrically Conductive AIN with High Thermal Conductivity

摘要

The electrically conductive AlN with high thermal conductivity were successfully fabricated by sintering AlN with a composite additive of 1wt.% Y_2O_3 and 4wt.% CeO_2 in carbon-reduced atmosphere at over 1600 °C. The sudden increase in electrical conductivity is thought to be caused by transition of grain boundary phase from rare-earth oxide to rare-earth oxycarbide. Their electrical conductivities and thermal conductivities increased with increasing sintering temperature. Additionally, sintering temperature influenced the resultant microstructures.