Air Pollution Control in the Semiconductor and Photoelectric Industries in Taiwan

摘要

The semiconductor and photoelectric industries in Taiwan are world-widely-famous industries with outstanding technology and profits. They are mainly located in the Science Based Industrial Park (SBIP) of Hsinchu, Taiwan. Due to stringent environmental regulations in Taiwan as well as increasing concerns from neighboring residents, the Administration Office of SBIP has established an air pollution control program to help semiconductor and photoelectric plants in the SBIP to improve their performance of air pollution control devices (APCDs). This paper intends to report results on the current status of air pollution control in the semiconductor and photoelectric plants in the SBIP. It was found that for the emissions reduction of VOCs, most of the semiconductor plants tend to install honeycomb zeolite concentrators/incinerators, but many of the photoelectric manufactures intend to use activated carbon adsorption devices instead. And for the acid and alkaline gas removals, all of the manufactures install the packed-bed wet scrubbers. Case studies of some manufactures encountering performance problems are discussed. And their improvement and help gained from this program are reported.