Field emission and optical emission spectroscopy study of carbon nanotubes grown using various source gases

摘要

We investigated the plasma diagnostic consisted of two kinds of source gas (C_3H_4 and CO) and NH_3 mixture using optical emission spectroscopy (OES). The active carbon source species were different in both system (CH radical in C_3H_4-NH_3 and CO radical in CO-NH_3), and there may be an optimum ratio of carbon source to etching species. It was found that the typical growth condition and emission property of CNTs using different source gases (C_3H_4 and CO) were quite different.