Gripping tools for handling and assembly of microcomponents

机译：用于处理和组装微型组件的夹持工具

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In this paper a vacuum gripper for handling of microstructures in MST will be presented as well as the design, production and testing of two types of mechanical micro-grippers used for handling and assembly of microcomponents. One of them is with possibility of optical force sensing.

机译：本文将介绍用于处理MST中微结构的真空夹具以及用于处理和组装微包装的两种机械微夹具的设计，生产和测试。其中一个是具有光学力传感的可能性。

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《International Conference on Microelectronics》|2002年||共4页
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Dragan Petrovic; Gordana Popovic; Elias Chatziteodoridis; Oscar Del Medico; Ana Almansa Franz Sumecz; Werner Brenner; Helmut Detter;
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中图分类 TN4-53;
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Gripping tools for handling and assembly of microcomponents

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