首页> 外文会议>International Congress on Applications of Lasers and Electro-Optics >RAPID LASER PATTERNING VERSUS WET-ETCH LITHOGRAPHY FOR FLAT PANEL DISPLAY MANUFACTURE: A TECHNICAL COMMERCIAL COMPARISON
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RAPID LASER PATTERNING VERSUS WET-ETCH LITHOGRAPHY FOR FLAT PANEL DISPLAY MANUFACTURE: A TECHNICAL COMMERCIAL COMPARISON

机译:快速激光图案化与平板显示器的湿法蚀刻光刻:技术和商业比较

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Rapid Laser Patterning (RLP) of ITO thin films on glass offers a credible industrial alternative to wet-etch lithography for the manufacture of Flat Panel Displays - particularly for Plasma Displays. For any disruptive technology it is necessary to compare and contrast it with the existing manufacturing technique so that end users can make an informed decision as to its relative merits - both technical and commercial. Both processes are compared empirically and it is demonstrated that RLP offers benefits in terms of edge resolution, taper and is less prone to residue. Furthermore a commercial cost model is generated based on real capital and operational cost data. This model suggests that RLP can offer cost savings in the order of tens of millions of dollars for a single production line over a three year depreciation period.
机译:玻璃上的ITO薄膜的快速激光图案化(RLP)提供了一种可靠的工业替代品,用于制造平板显示器的湿法蚀刻光刻 - 特别是对于等离子显示器。对于任何中断技术,有必要将其与现有的制造技术进行比较和对比,以便最终用户可以对其相对优点进行明智的决定 - 技术和商业。对两个过程进行了经验比较,并证明RLP在边缘分辨率锥度逐渐变细并不易易于残留物。此外,基于实际资本和运营成本数据生成商业成本模型。该型号表明,RLP可以在三年折旧期间为单一生产线提供数千万美元的成本节省。

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