Design of Micro Force-Moment Sensors and Application to Soft Fingertip Sensor

摘要

This paper presents the design and simulation of multi-axis silicon micro force moment sensing (MFMS) chips and its application to soft fingertip sensor. Working principle of these MFMS chips is based on piezoresistive effect of single crystal silicon. Three types of MFMS chips with different structures were simulated for sensitivity and measurement range. A configuration of a multi-axis soft fingertip sensor utilizing MFMS chips is also presented. The fingertip sensor was numerically simulated to decide the dimensions of each part of the sensor and to specify its performance characteristics.