Domed Shape Chamber for High Performance of Pneumatically Driven All PDMS Diaphragm Micro Valve

摘要

This paper presents a domed shape chamber for a pneumatically driven all PDMS (polydimethylsiloxane) diaphragm micro valve. The micro valve uses the deformation of PDMS diaphragm by pneumatic driving pressure. A chamber for the valve is designed in a channel. The domed shape structure for an inside wall of the chamber can provide a good overlapping of the deformed diaphragm against the chamber wall. We report domed shape structure for the chamber in order to improve valve performances. The molding technique is used to form the domed shape structure. We employ two kinds of methods to form the domed shape mold: 1) Reflow of photoresist, 2) Deformation of diaphragm due to thermal expansion of trapped air. Developed micro valves are characterized from aspects of the dead volume and valve efficiency. Improved valve performance will be reported based on the experimental results.