Development of a System for 3-D Micro Metrology Using an Ultra-Small-Diameter Optical Fiber Probe - Optical Analysis and Evaluative Experiment Using the 0.4 μm Diameter Stylus Shaft

摘要

In recent years, demand has increased for a method that can precisely measure microstructures of mechanical micro parts, micro electro mechanical systems (MEMS), micro molds, optical devices, and micro holes, etc. However, it is very difficult to precisely measure the shape of micro structure with a large length-to-diameter (L/D) ratio because of the difficulty of probe fabrication and sensing method with very small measuring force. Studies have reported micro structure measurement techniques employing a variety of probes such as optical probes, vibroscanning probes, vibrating probes, tunneling effect probes, opto-tactile probes, fiber deflection probes, optical trapping probes, and diaphragm probes [1-9].