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Microscope objectives for semiconductor metrology: technology driver for the mounting technology of optical high performance systems with small diameters

机译：半导体计量学的显微镜物镜：小直径光学高性能系统安装技术的技术驱动器

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Sondermann Mario; Theska René;
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年度 2011
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正文语种 eng
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1. 3-D Optical Microscopes: a basic technology comparison for metrology applications [J] . MATT NOVAK, DEEPAK SHARMA Quality . 2013,第4期

机译：3-D光学显微镜：用于计量应用的基本技术比较
2. Shop-floor scheduling of semiconductor wafer fabs: exploring the influence of technology, market, and performance objectives [J] . Sloan T.W. IEEE Transactions on Semiconductor Manufacturing . 2003,第2期

机译：半导体晶圆厂的车间调度：探索技术，市场和性能目标的影响
3. Shop-floor scheduling of semiconductor wafer fabs: exploring the influence of technology, market, and performance objectives [J] . Sloan T.W. IEEE Transactions on Semiconductor Manufacturing . 2003,第2期

机译：半导体晶圆厂的车间调度：探索技术，市场和性能目标的影响
4. DUV-Microscope objectives: technology driver that forces the production to switch from the micrometer scale to the nanometer scale [C] . Thomas Sure, Tobias Bauer, Joachim Heil, Optical Fabrication, Testing, and Metrology II . 2005

机译：DUV-Microscope目标：技术驱动器，可迫使生产从微米级转换为纳米级
5. Corn plant location, spacing and stalk diameter measurements using optical sensing technologies [D] . Shi, Yeyin 2014

机译：使用光学传感技术测量玉米植株的位置，间距和茎秆直径
6. Driving Performance and Technology Acceptance Evaluation in Real Traffic of a Smartphone-Based Driver Assistance System [O] . Gheorghe-Daniel Voinea, Cristian Cezar Postelnicu, Mihai Duguleana, 2020

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7. Optical metrology alignment and impact on the measurement performance of the LISA Technology Package [O] . Hirth, M., Fichter, W., Brandt, N., 2009

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8. Metrology and Data for Microelectronic Packaging and Interconnection: Results ofa Joint Workshop on Materials Metrology and Data for Commercial Electrical and Optical Packaging and Interconnection Technologies. Held in Gaithersburg, Maryland on May 5-6, 1 [R] . Schen, M. A. 1994

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Microscope objectives for semiconductor metrology: technology driver for the mounting technology of optical high performance systems with small diameters

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