A Study of Factors Influencing Micro-Chevron-Testing of Glass Frit Bonded Interfaces

摘要

On industrial scale, glass frit bonding is widely used for assembly and encapsulation of MEMS. A key task to guarantee functionality and reliability is the classification of the quality and strength of the bonding interface. Caused by the wide range of used test setups and test parameters, the estimated strength values are not directly comparable to each other. The presented work discusses critical parameters and test setups, which influence resulting strength values of glass frit bonded interfaces. For this purpose, mechanical testing is supported by scanning acoustic microscopy inspection for sample validation. The results can provide a guideline for the evaluation of comparable strength properties of glass frit bonded interfaces.