Evaluation of ozone emissions destruction units for SACVD process tools

摘要

Motorola uses ozone in the sub-atmospheric chemical vapor deposition (SACVD) process. Ozone is generated continuously and delivered to the tools where it is either consumed in the process or diverted to the gas panel exhaust stream when not required by the process. As a result of the continuous generation, ozone emissions can be significant. Several drivers have led to the development of goals to reduce ozone emissions. In order to quantify ozone emissions from SACVD tools, stack testing using extractive FTIR was conducted in addition to point of generation testing. Based on the measured concentrations, algorithms were developed to quantify ozone emissions. Although expensive solutions exist for reducing ozone emissions, low cost solutions were investigated. A solution that appears to reduce ozone emissions and is relatively low cost to implement is point-of-use ozone catalytic destruction. These ozone destruction units were evaluated on two different process tools to determine if ozone emissions reductions are feasible for multiple platforms of SACVD tools. This evaluation identified that a catalytic ozone destruction unit can significantly reduce ozone emissions.