Mechanical properties of diamond-like carbon (DLC) films synthesized by pulsed vacuum arc plasma deposition

摘要

In this paper Diamond-like Carbon (DLC) films were fabricated on Ti6Al4V and Si(100) substrates at room temperature by pulsed vacuum are plasma deposition. The analysis of the X-ray photoelectron spectra (XPS) of C ls core level of thin DLC films, obtained at different argon gas inlets is presented. From the deconvoluted spectra the sp{sup}3 content in the films is evaluated. It is found the sp{sup}3 content to decrease from 78% to 59% as the argon inlet is varied from 0 to 13 seem. The nano-hardness of the DLC film can reach 96GPa as the argon inlet is 0 sccm. The nano-hardness first increased and then decreased as the argon inlet increasing. This is a result of the competition between the concentration ration of sp{sup}3 versus sp{sup}2 bonded carbon atoms and residual micro-stress. When the argon inlet increased, the concentration ration of sp{sup}3 versus sp{sup}2 bonded carbon atoms decreased, but residual micro-stress of the DLC films increased because of the argon ion bombardment. The DLC films have high wear resistance, low friction and good adherence with Ti6Al4V.