Mass spectrometric characterization of pulsed plasmas for deposition of thin polyethylene glycol-like polymer films

摘要

In this work we characterize pulsed inductively coupled rf plasmas of two organic precursor molecules, isopropyl alcohol and 1,4 dioxane using Langmuir probes and in situ mass spectrometry. We identify the key ionized species diffusing to the substrate and offer an explanation as to how they are generated. The ultimate goal of this work is to develop predictable models for PECVD processes for thin polymer films with functionalized surfaces.