Attributed to the characteristics of no size effect and good machinability, metallic glasses are considered to be ideal materials for micro-electro-mechanical systems (MEMS). In this paper, two kinds of thin film metallic glasses (TFMGs), the Zr-based (Zr{sub}75Cu{sub}19Al{sub}6, atomic %) and the Pd-based (Pd{sub}76Cu{sub}6Si{sub}18) TFMGs were fabricated using RF-magnetron sputtering system, and the amorphicity of the as-sputtered TFMGs were verified by X-ray diffraction and electron diffraction patterns. Compositions of the TFMGs were analyzed by energy dispersive X-ray spectrometry. Meanwhile, the thermal, mechanical and electrical properties of the TFMGs were experimentally examined, which provide an important guide for the analysis and design of their MEMS applications.
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