Fabrication of Thin Film Metallic Glasses and Their properties

摘要

Owing to their mechanical isotropy, structural homogeneity and good formability for three-dimensional micro structure, thin film metallic glasses (TFMGs) are considered to be one of ideal materials for micro-electro-mechanical systems(MEMS). However the physical properties of thin film metallic glasses have not yet examined sufficiently. In this paper, physical properties of two kinds of TFMGs; Zr-based (Zr_75Cu_19Al_6, atomic /100) and Pd-based (Pd_76Cu_7Si_17), were examined to provide an important guide for the analysis and design of their MEMS applications.