Characteristics of the MFIS-FET structures processed using SBT ferroelectric thin films

摘要

Pt/SBT/TiO/sub 2//Si and Pt/SBT/ZrO/sub 2//Si structures were prepared for metal/ferroelectric/insulator/semiconductor field effect transistor (MFIS-FET) applications. After depositing TiO/sub 2/ or ZrO/sub 2/ films of 10-50 nm thickness by reactive sputtering on Si[100] substrates as buffer layers, SBT thin films of 400 nm thickness were prepared onto it using liquid source misted chemical deposition. Maximum capacitance of the Pt/SBT/TiO/sub 2//Si and Pt/SBT/ZrO/sub 2//Si structures increased with decreasing thickness of TiO/sub 2/ and ZrO/sub 2/ buffer layers. PVSBT/TiO/sub 2//Si and Pt/SBT/ZrO/sub 2//Si structures exhibited a well-defined C-V hysteresis loop. Memory windows of the Pt/SBT(400 nm)/TiO/sub 2/(10 nm)/Si and Pt/SBT(400 nm)/ZrO/sub 2/(10 nm)/Si were 1.6 V and 0.72 V at 5 V, respectively.