PZT thin film bi-layer devices for improved actuation in MEMS

摘要

A potential application for ferroelectric thin films is micro positioning and actuation. For using PZT films as micro-actuators it is desirable to have film thicknesses of comparable size to the underlying structure. The amount of actuation possible is determined by the electric field across the film. Using a bi-layer should therefore increase the amount of actuation. PZT films of thickness 0.5 μm have been deposited as a bilayer. Micro-actuators have been fabricated using these structures, their electric properties measured and their electro-mechanical properties characterised and evaluated using optical beam deflection.