Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5/spl mu/m in size together with polysilicon bending supports. Experimentally, it can lift a 87 /spl mu/N (or 8.88 mg) force under a magnetic field of approximately 2 x 10/sup 4/ A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.
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机译：已经研究了合格磁性致动器的阵列，以用作精密微机器人组装系统。已经测试了执行器阵列，用于升降和移动硅和玻璃芯片。致动器单元由尺寸为1mm×1mm×5 / Spl mu / m的渗透板，与多晶硅弯曲支撑件一起组成。实验，它可以在约2×10 / sup 4 / m的磁场下提升87 / spm mu / n（或8.88mg）力。已经观察到提出的同步驾驶模式，并且已经证明了硅芯片的平移和旋转。
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