Results on design, fabrication, and testing of silicon micromachined magnetic actuators are presented. Electroplated, low-stress Permalloy (Ni/sub 80/Fe/sub 20/) material is the medium for magnetic interaction and force generation. The Permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 /spl mu/N) and large displacement (on the order of 100 /spl mu/m). The vertical loading force of magnetic actuators under external bias has been experimentally determined. Applications of such actuators in magnetically assisted levitation and parallel assembly of three-dimensional structures are demonstrated.
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机译:介绍了硅微机械磁致动器的设计,制造和测试结果。电镀的低应力坡莫合金(Ni / sub 80 / Fe / sub 20 /)材料是产生磁性相互作用和产生力的介质。坡莫合金片由结构板支撑,该结构板由通过低压化学气相沉积(LPCVD)制备的多晶硅薄膜组成。由悬臂梁和扭转梁支撑的磁致动器可以提供较大的力(大约100 / spl mu / N)和较大的位移(大约100 / spl mu / m)。磁致动器在外部偏压下的垂直加载力已通过实验确定。演示了这种执行器在磁悬浮和三维结构平行装配中的应用。
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