More and more AFM's and AFM-profilers will be used to quantify micro- and nanostructures. For a correct characterization and evaluation of the measured structural details, in the nanoscale range, knowledge of the current shape of the AFM-tip is needed. Often the interaction between the AFM-tip and the sample leads to a change of the tip shape. Our concept for the determination of tip-shapes is based on the measurement of a well-known sharp-edged silicon structure. Each such calibration sample also contains a selected structure serving as a calibrated width-standard. Consequently, the shape of AFM tips can be determined with an accuracy of 10 nm.
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