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MODELING AND OPTIMIZATION OF SiC BULK CRYSTAL GROWTH BY SUBLIMATION TECHNIQUE

机译:通过升华技术模拟和优化SiC散装晶体生长

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Inverse modeling has been applied to optimize the crucible design for SiC bulk crystal growth by sublimation technique. The temperature distribution over the powder charge is the main target of the optimization. As a result of computations, the growth crucible design is found, providing a nearly isothermal temperature distribution in the powder, which is known to be beneficial for long-term growth stability. Meeting of complex requirements on the desirable temperature profile is shown to be possible. The implementation of the inverse modeling for temperature optimization is discussed in detail.
机译:已经应用反向建模以通过升华技术优化用于SiC散装晶体生长的坩埚设计。粉末电荷的温度分布是优化的主要目标。作为计算的结果,发现生长坩埚设计,在粉末中提供近似等温温度分布,这已知是有益的长期生长稳定性。显示了对所需温度曲线的复杂要求的会议是可能的。详细讨论了温度优化的逆建模的实现。

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