SHIELDS INFLUENCE ON HEAT TRANSFER IN REDMET-30 HOT ZONE

摘要

The mathematical modeling of a 100 mm silicon single crystals growth in Redmet-30 hot zone in radiative-conductive approximation is executed. The calculations were carried out by finite elements method on the basis of global thermal model and CRYSTMO code. The research of the thermal shields influence (their arrangement and materials) on a thermal field in a pulling crystal and energy expenses is carried out. The parameters of thermal shields allowing to reduce a temperature gradients in a crystal and to lower a heat losses are determined.