EFFECT OF BENZOTRIAZOLE (BTA) ON THE REDUCTION OF FERRIC ION ON COPPER

摘要

The effect benzotriazole (BTA) on the reduction of ferric ion was studied using electrochemical techniques. In the absence of (BTA), the reaction was found to be transport-controlled. The addition of BTA decreased the cathodic current and changed the reaction from transport control to mixed control. The kinetic current decreased with increasing concentration of BTA. Implications for copper chemical mechanical polishing are discussed.