Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD

机译：高度均匀和可重复的850nm垂直腔表面发射激光器，由MOCVD生长

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850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of Fabry-Perot cavity wavelength for VCSEL materials of ±O.15 OXO across a 3-in diameter wafer was achieved. Also, ±0.1 % Al composition uniformity of Al{sub}(0.98)Ga{sub}(0.02) was obtained.

机译：通过金属有机化学气相沉积（MOCVD）生长850nm垂直腔表面发射激光器（Vcsels）。达到了在3直径晶片上达到±O.15氧代摩尔±O.15氧代的VCSEL材料的高均匀性。此外，获得了Al {Sub}（0.98）Ga {sub}（0.02）的±0.1％Al组成均匀性。

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《Pacific Rim Conference on Lasers and Electro-Optics》|2001年||共2页
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H. J. Jang; Y. H. Song; B. J. Jeong; K. H. Lee; J. K. Son; Y. H. Lee; D. G. Choi; S. S. Yang; J. W. Yang; K. Y. Lim; G. M. Yang;
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专利

1. All MOCVD grown 850-nm-wavelength refractive-index-guided semiconductor-buried vertical-cavity surface-emitting lasers with p-InGaP current blocking layers [J] . Uenohara H., Tateno K. IEEE Photonics Technology Letters . 2000,第6期

机译：所有具有p / n-InGaP电流阻挡层的MOCVD生长的850纳米波长折射率引导的半导体埋入式垂直腔表面发射激光器
2. Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry [J] . Hou H.Q., Chui H.C. IEEE Photonics Technology Letters . 1996,第10期

机译：通过金属有机气相外延和原位反射法生长的高度均匀且可重现的垂直腔面发射激光器
3. Investigation of dynamic polarization stability of 850-nm GaAs-based vertical-cavity surface-emitting lasers grown on [311]B and [100] substrates [J] . Uenohara H., Tateno K. IEEE Photonics Technology Letters . 1999,第4期

机译：在[311] B和[100]衬底上生长的基于850 nm GaAs的垂直腔面发射激光器的动态偏振稳定性的研究
4. Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD [C] . Jang, H.J., Song, . 2001

机译：通过MOCVD生长的高度均匀且可重现的850 nm垂直腔面发射激光器
5. Design, fabrication, and characterization of 850 nm vertical-cavity surface-emitting lasers. [D] . Dang, Gerard Tu. 2001

机译：850 nm垂直腔面发射激光器的设计，制造和表征。
6. Quantum dot vertical-cavity surface-emitting lasers covering the ‘green gap’ [O] . Yang Mei, Guo-En Weng, Bao-Ping Zhang, 2017

机译：覆盖绿色间隙的量子点垂直腔表面发射激光器
7. Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition [O] . Hou, H.Q., Chui, H.C., Choquette, K.D., 1996

机译：通过金属有机化学气相沉积生长的高度均匀且可再现的垂直腔表面发射激光器
8. Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE [R] . Hou, H. Q. , Choquette, K. D. , Hammons, B. E. , 1997

机译：通过mOVpE生长的近红外垂直腔面发射激光器具有高度均匀和可再现的可见性

Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD

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