Based on the geometrical features of the AFM (Atomic Force Microscope) diamond tip as well as the interaction existed between the diamond tip and the machined material, a theoretical model regarding single asperity cutting has been put forward. The experiments were conducted on various materials including Al-alloy, single crystal germanium and silicon with different normal loads and cutting speed. On the basis of the theoretical analysis verified with the experimental results, a study of cutting process on nano-scale in terms of cutting force and the material removal mechanism was conducted.
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