Precision Alignment Of Fiber Optics Assemblies By Using A Novel 'Super Precise' Nano Positioning System.

摘要

Magnetostrictive 'nano' actuators for super-precision positioning in steps of 10~(-2) nm over a range of travel up to 1 m have been investigated and developed [1-5]. The actuators generate forces up to 10~(4) N and are suitable as force actuators. Exact movement is achieved by an active element made from Terfenol D alloy based on rare-earth metals with giant magnetostriction. The actuators can be controlled manually without any additional power source or by using a computer. For manual control the minimum linear positioning step is up to 0,6 nm, and angular displacement step is 15x10~(-3) angular seconds, whereas for computer-controlled step motors these parameters are 0,01 nm and 4x10~(-5) angular seconds, respectively.