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Steps Toward Fabricating Cryogenic CMOS Compatible Single Electron Devices

机译:制造低温CMOS兼容单电子器件的步骤

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We describe the development of a novel silicon quantum bit (qubit) device architecture that involves using materials that are compatible with a Sandia National Laboratories (SNL) 0.35 mu m complementary metal oxide semiconductor (CMOS) process intended to operate at 100mK. We describe how the qubit structure can be integrated with CMOS electronics, which is believed to have advantages for critical functions like fast single electron electrometry for readout compared to current approaches using radio frequency techniques. Critical materials properties are reviewed and preliminary characterization of the SNL CMOS devices at 4.2K is presented.
机译:我们描述了一种新颖的硅量子比特(QUBit)设备架构,其涉及使用与伴随的桑迪亚国家实验室(SNL)0.35μm的互补金属氧化物半导体(CMOS)方法兼容的材料,该方法涉及100MK。我们描述了如何与CMOS电子集成的量子位结构如何,其被认为具有与使用射频技术的电流接近相比的快速单电子电气测定的关键功能的优点。介绍关键材料特性,并提出了4.2K时的SNL CMOS器件的初步表征。

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