Micro-supercapacitors (MSCs) are recognized as potential power supply units for on-chip micro-devices because they possess not only the advantages of supercapacitors, but also the simplified packaging processes and compatibility with integrated circuits. Laser direct writing technique has been demonstrated as an effective tool for the fabrication of micro-supercapacitors and electronic devices using different materials. However, the high-performance micro-supercapacitors and the integration with electronic devices even the portable or wearable self-powered systems fabricated by laser direct writing technique or in combination with other techniques still need to be demonstrated. In this paper, we will introduce our recent studies on the following several parts: the preparation of carbon-based micro-supercapacitors by laser direct writing on polyimide films in air, the improvement of the carbon MSC by laser direct writing in Ar, the carbon/TiO_2 MSC with photo-rechargeable capability, the carbon/Au MSC with high-rate charge-discharge performance, and the in-plane integrated circuits with MSCs and sensors using laser direct writing technique combining with other methods.
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机译：微超级电容器（MSCS）被识别为片上微器件的潜在电源单元，因为它们不仅具有超级电容器的优点，而且具有简化的包装工艺和与集成电路的兼容性。激光直接写入技术已被证明是使用不同材料制造微超级电容器和电子设备的有效工具。然而，高性能微型超级电容器和与电子设备的集成甚至是通过激光直接写入技术或与其他技术组合制造的便携式或可穿戴的自动系统仍然需要证明。在本文中，我们将介绍我们最近关于以下几个部分的研究：通过激光直接写入空气中的聚酰亚胺膜的激光直接写入碳基微型超级电容器，通过激光直接写入AR，碳的碳MSC改善/ TiO_2 MSC采用光可充电能力，Carbon / Au MSC具有高速充电性能，以及使用激光直接写入技术与其他方法的MSC和传感器的平面内集成电路。
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