fault location; etching; production equipment; semiconductor device manufacture; statistical process control; pattern recognition; plasma materials processing; production facilities; real-time fault detection; real-time fault classification; manufacturing etch tools; process control; semiconductor manufacturing; tool productivity; statistical process control; pattern recognition algorithm; Straatum/spl trade/; plasma index; ProMOS Technologies Inc; manufacturing facility; semiconductor tool; Tokyo/spl trade/; DRM/spl trade/; oxide etch tool;
机译:使用实时故障检测和分类控制蚀刻工具
机译:半导体制造等离子蚀刻设备的故障检测和分类-诊断
机译:用于半导体蚀刻工具在线故障检测的多元参数迹线分析
机译:制造蚀刻工具的实时故障检测和分类
机译:深亚微米等离子体蚀刻中的实时反馈控制和故障检测。
机译:PLAT:一种用于PLC控制的制造系统的自动故障和行为异常检测工具
机译:半导体制造工具的同时故障检测和分类