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Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

机译：半导体制造工具的同时故障检测和分类

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Brian E. Goodlin; Duane S. Boning; Herbert H. Sawin; Barry M. Wise;
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年度 2002
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1. Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing [J] . Zhu Feng, Jia Xiaodong, Miller Marcella, IEEE Transactions on Semiconductor Manufacturing . 2021,第1期

机译：半导体制造中的故障检测和分类的重要传感器筛选方法
2. Joint modeling of classification and regression for improving faulty wafer detection in semiconductor manufacturing [J] . Kang Seokho Journal of Intelligent Manufacturing . 2020,第2期

机译：改进半导体制造中缺陷晶片检测的分类和回归联合建模
3. Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence [J] . Chen-Fu Chien, Chia-Yu Hsu, Pei-Nong Chen Flexible Services and Manufacturing Journal . 2013,第3期

机译：半导体故障检测和分类，以提高良率和制造智能
4. Simultaneous fault detection and classification for semiconductor manufacturing tools [C] . Brian E. Goodlin, Duane S. Boning, Herbert H. Sawin, Symposium on Plasma Processing . 2002

机译：半导体制造工具的同时故障检测与分类
5. A Novel Fault Detection and Classification Approach in Semiconductor Manufacturing Using Time Series Alignment Kernel [D] . Zhu, Feng. 2020

机译：使用时间序列对准核的半导体制造的一种新型故障检测和分类方法
6. PLAT: An Automated Fault and Behavioural Anomaly Detection Tool for PLC Controlled Manufacturing Systems [O] . Arup Ghosh, Shiming Qin, Jooyeoun Lee, 2016

机译：PLAT：一种用于PLC控制的制造系统的自动故障和行为异常检测工具
7. APC Technique and Fault Detection and Classification System in Semiconductor Manufacturing Process [O] . Dae-Geun Ha, Jun-Mo Koo, Dam-Dae Park, 2015

机译：APC技术与故障检测和半导体制造过程中的分类系统

Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

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