In order to realize nanometer level planar positioning, a piezoelectrically driven x-y micropositioning table with high performance is developed. A flexure hinge mechanism is adopted to guide the moving platform and to provide preload for the piezoelectric actuators. The lever amplifiers are used to enlarge the working range of the moving platform. With consideration of the driving circuit effect, the dynamic model of the micropositioning table is established. The influence of the time constant RC on the dynamic characteristics of the table is investigated. A series of experimental testing is carried out to verify the performance of the x-y micropositioning table. From the experimental data, it is noted that the piezoelectrically driven x-y micropositioning table has a resolution of 5 nm, which indicates that the micropositioning table is useful for nanometer level positioning applications.
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