TWI 311 IMPLEMENTATION IN A 300 MM PRODUCTION LINE FOR W CMP AT PROMOS

摘要

TWI311 of Thomas West Inc. is implemented in a 300 mm production line tungsten CMP at ProMOS Technologies. In line data for TWI311 pad is directly compared with POR pad data. The TWI311 pad shows consistent performance and makes a significant improvement in electrical performance and defects for both tungsten plugs and local interconnect metal lines in key advanced technology.