300mm 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE

摘要

Disclosed is a container for generating a microenvironment. The container includes a shell 10, a door 90, and a plurality of supports 60 having a unique design used to reliably receive a product such as a silicon wafer 80 spaced in parallel with each other. The support is detachable. An electrical passage is provided to ground the support. For example, a dynamic coupling structure 44-46 is also provided to position the container on the surface to properly align the door with the port of the wafer processing tool.