XYZ-Stage for scanning probe microscope by using parallel mechanism

摘要

This paper deals with a xyz-stage for a scanning probe microscope (SPM) by using a parallel mechanism with 6 degrees of freedom. Multilayer piezos are used to change the link length in the prototype. The movable range of the prototype is 100#mu#m in the x- and y- directions and 10#mu#m in the z- directions. The resonant frequency of the prototype is approximately 100 Hz in the x- and y- direction and approximately 50 Hz in the z- direction. The motion of the stage is controlled by the induced charge feedback control to allow compact SPM designs. The motion error is 16 nm in the z- direction by the induced charge feedback control. The displacement of the prototype can be controlled by the induced charge feedback control as well as by the displacement feedback control. This stage is applied to a positioning device of an atomic force microscope (AFM). The grooves of the diffraction grating are observed with good linearity with the AFM. The prototype can be used for the positioning device of the AFM.