Scanning mechanism for scanning probe microscope and scanning probe microscope

摘要

A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the insulating board, wires for the application of a voltage to the Z-direction moving actuator, and electrical connecting portions for electrically connecting the wires to the Z-direction moving actuator. The Z-direction moving actuator has a piezoelectric element that can expand and contract along the X-axis. The object is mounted on the free end of the piezoelectric element. The electrical connecting portions are provided at the fixed end of the piezoelectric element.