Integrated vertical-cavity laser diodes and resonant photodetectors with hybrid Si{sub}3N{sub}4/SiO{sub}2 top Bragg mirrors

摘要

We present a technology to integrate VCSEL's and REPD's in the top-emitting geometry, utilizing Si{sub}3N{sub}4/SiO{sub}2 top Bragg mirrors. This technique allows to tune the detector's optical bandwidth in a wide range without affecting the laser performance. The results are compared to numerical simulations.