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POROUS SILICON SENSORS : A REVIEW ON THEIR FABRICATION AND APPLICATIONS

机译:多孔硅传感器:对其制造和应用的综述

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摘要

In this work the fabrication processes and structure properties of porous silicon based sensors are reviewed and discussed. It is shown that, thanks to its full compatibility with the silicon substrate, to its very large surface area, to the simple and cheap fabrication process, porous silicon reveals good potentiality for gas sensor devices, although strong efforts have still to be done for its definitive assessment as basic material for sensors applications.
机译:在这项工作中,回顾和讨论了多孔硅基传感器的制造工艺和结构性能。结果表明,由于其与硅衬底的完全兼容,到其非常大的表面积,以简单且廉价的制造工艺,多孔硅揭示了气体传感器装置的良好潜力,尽管仍然需要进行强大的努力将定期评估为传感器应用的基本材料。

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