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Abrasive capacity of thin film diamond structures

机译:薄膜金刚石结构的磨料容量

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Diamond structures were produced with a three-step replication technique. First a mould is created using standard silicon wafer patterning technology. Diamond was then deposited in a CVD process onto the mould surface. The last step is to electroplate a nickel backing on the diamond film and remove the silicon mould. Using this technique, diamond pyramids of different size and lateral distribution were produced. The wear rates of brass, steel, aluminium oxide and silicon nitride caused by the diamond structures were compared with that of commercial silicon carbide grinding paper in a pin-on-disc configuration. The diamond pyramids abraded with a much higher rate than the silicon carbide grinding paper on all materials except brass. This was especially pronounced for aluminium oxide.
机译:用三步复制技术生产金刚石结构。首先,使用标准硅晶片图案技术创建模具。然后将金刚石沉积在CVD工艺中到模具表面上。最后一步是将镍背衬在金刚石薄膜上电镀并去除硅模。使用这种技术,产生了不同尺寸和横向分布的金刚石金字塔。将由金刚石结构引起的黄铜,钢,氧化铝和氮化硅的磨损率与销钉配置中的商用碳化硅研磨纸进行比较。除了黄铜之外的所有材料上,金刚石金字塔的速度高于碳化硅磨纸。这对氧化铝特别明显。

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