This paper describes the methods used to fabricate thin-film, rechargeable microbattery cells specified to provide sufficient power for mobile, autonomous MEMS applications. The initial prototype microbattery cells reported here achieved current densities greater than 12 mA/cm~2 at an operating voltage of ～1.5 volts, and were recharged for more than 260 cycles. The microbattery reported here was fabricated using high-volume, thin-film processes that produce microbattery cells with thicknesses of less than 100μm (excluding the inert substrate), cell area of less than 0.01 cm~2, and a form factor consistent with high-volume electronic assembly.
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