Root Cause Analysis and Correction of Single Metal Contact Open-Induced Scan Chain Failure in 90nm node VLSI

摘要

In this paper, the localization of open metal contact for 90nm node SOC is reported based on Electron Beam Absorbed Current (EBAC) technique and scan diagnosis for the first time. According to the detected excess carbon, silicon and oxygen signals obtained from X-ray energy dispersive spectroscopy (EDX), the failure was deemed to be caused by the incomplete removal of silicate photoresist polymer formed during the O_2 plasma dry clean before copper plating. Based on this, we proposed to replace the dry clean with diluted HF clean prior to the copper plating, which can significantly remove the silicate polymers and increase the yield.