APPLICATION OF PTFE MEMBRANE CONTACTORS TO THE INFUSION OF OZONE INTO ULTRA-HIGH PURITY WATER

摘要

Novel semiconductor wafer cleaning processes employing ozonated de-ionized water is rapidly gaining acceptance. A novel fluoropolymer membrane contactor is described which is capable of producing high concentrations of dissolved ozone, bubble-free, on a continuous basis. Performance results are compared to the predictions of mass transfer theory. Gas pressure, ozone concentration and liquid flow rate were found to be the most important operating parameters.