NEW TUBING MATERIAL FOR SPECIALTY GASES: FERRITIC STAINLESS STEEL TUBE WITH INERT Cr_2O_3 SURFACE

摘要

The tubing material plays a significant role in establishing the trouble-free distribution system for the corrosive and reactive specialty gases. The materials should have such features as quick dry-down, least particle emission, corrosion resistance and non-catalytic property. The ferritic stainless steel tube with Cr_2O_3 surface developed can be an answer for this need. The ferritic stainless steel of 26% chromium content is made by the double melt process : vacuum induction melting (VIM) followed by vacuum arc re-melting (VAR), and processed into the tubing. The Cr_2O_3 film is formed on the electro-polished surface of the tube through the oxidation under a weak oxidizing atmosphere. The tube with Cr_2O_3 film shows the excellent corrosion resistance required as the tubing material for specialty gases.