PRACTICAL ASPECTS OF CLEANROOM SOUND LEVEL CONTROL

摘要

While the design of cleanrooms typically centers on particle counts, and temperature/humidity control, other design parameters have more or less importance depending on the cleanroom application. Sound level specification and the manner in which sound in the cleanroom is controlled can be important to some users. This paper describes the manner in which sound level can be specified, how cleanroom design will vary with increasingly stringent sound criteria, the economic impact of over specification of sound levels, and how sound level can be measured in the cleanroom to determine compliance with the design specification.