Miniature Quadrupole Arrays For Residual and Process Gas Analysis

摘要

This paper includes computer simulations based on ray tracing to aid in the design of miniature quadrupoles. The trade-offs between sensitivity and resolution for different mechanical and electrical configurations are examined using real time trajectories of ions. At higher pressures, space charge effects at the inlet of the mass filter are simulated to properly design electrode apertures and spacing. Spectra obtained with constructed miniature quadrupole array using the results of ray tracing are also presented. Since they are able to operate at higher pressures, these sensor-type devices are used as residual gas analyzers (RGAs) and as process gas analyzers (PGAs) in many semiconductor applications. Networking multiple sensors to monitor the state of the semiconductor manufacturing tool and the wafers at different stages of the process enables real-time wafer-to-wafer control using preset fault detection schemes.