A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing

摘要

We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with a ring radius of 200 urn resonate in the frequency range 0.4 MHz-0.6 MHz, in the presence of tuning. By applying DC bias voltage in the range 4 V-10 V, a frequency tuning range of 330,000 ppm has been achieved.